JPS6447046U - - Google Patents
Info
- Publication number
- JPS6447046U JPS6447046U JP14077687U JP14077687U JPS6447046U JP S6447046 U JPS6447046 U JP S6447046U JP 14077687 U JP14077687 U JP 14077687U JP 14077687 U JP14077687 U JP 14077687U JP S6447046 U JPS6447046 U JP S6447046U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- corners
- exhaust hole
- triangular inner
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001179 sorption measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14077687U JPS6447046U (en]) | 1987-09-14 | 1987-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14077687U JPS6447046U (en]) | 1987-09-14 | 1987-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447046U true JPS6447046U (en]) | 1989-03-23 |
Family
ID=31405258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14077687U Pending JPS6447046U (en]) | 1987-09-14 | 1987-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447046U (en]) |
-
1987
- 1987-09-14 JP JP14077687U patent/JPS6447046U/ja active Pending